Microwave Plasma Experimental Device MiPC-500
Microwave Plasma Experimental Device MiPC-500
Introducing the plasma experimental equipment using microwaves handled by Arios Corporation. Arios Corporation, which designs all components such as plasma sources and microwave power supplies in-house, offers flexible designs that only we can provide. We will design and manufacture according to the specifications required by our customers. 【Features】 ○ Microwave experimental equipment capable of various plasma exposure experiments, including DLC films, carbon nanotubes, plasma sterilization, and vacuum ultraviolet irradiation, can be produced in a wide variety. ○ The substrate movement mechanism allows for arbitrary positioning of the substrate and plasma, enabling compatibility with various processes. ○ By inserting the substrate into the plasma, it is heated by the plasma, eliminating the need for a heater during diamond thin film production. ○ The exhaust system can accommodate rotary pumps and mechanical boosters, and can even support ultra-high vacuum conditions. ● For other functions and details, please download the catalog.
- Company：アリオス
- Price：Other
